FIB-SEM with orthogonal geometry (FIB accelerating voltage up to 30 kV, SEM between 0.1 and 30 kV), equipped with Ar ion beam cleaner (0.5-2 kV), EDS, EBSD and STEM detectors. Real-time Cut & See 3D reconstruction, SEM-STEM, 3D-EDS and 3D-EBSD options are available.
【Product Specification】
・Triple Beam System for Ga FIB-induced Damage Reduction
・FIB Accelerating Voltage ：〜30kV
・SEM Accelerating Voltage ：0.1kV 〜 30kV
・Ar Ion Beam Accelerating Voltage：0.5kV 〜 2kV
・Sample Chamber and Stage for Various Applications
・Multi Gas Injection system by Triple Beam deposition
・Micro-sampling (MPS-5)
【Key Features】
・High quality Lamella preparation
・High Performance FE-SEM with Duo-lens Mode
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