ƒAƒNƒZƒX‚¨–â‚¢‡‚¹ English
ƒgƒbƒvƒy[ƒW Žx‰‡‚ÌŠT—v ‘•’uˆê—— —˜—p•ñ Žx‰‡‘̐§ —˜—pˆÄ“à
ƒoƒCƒI/–³‹@Þ—¿—p‚‘¬FIB-SEMƒVƒXƒeƒ€@ETHOS@NX5000
ƒoƒCƒI/–³‹@Þ—¿—p‚‘¬FIB-SEMƒVƒXƒeƒ€@ETHOS@NX5000
Žd@—l
FIB “ñŽŸ“dŽq
‘œ•ª‰ð”\
iC.Pj
4 nm @ 30 kVA
60 nm @ 2 kV
‰Á‘¬“dˆ³ 0.5 kV – 30 kV
ƒvƒ[ƒu
“d—¬”͈Í
0.05 pA – 100 nA
ƒCƒIƒ“Œ¹ GA‰t‘Ì‹à‘®ƒCƒIƒ“Œ¹
SEM “ñŽŸ“dŽq
‘œ•ª‰ð”\
iC.Pj
1.5 nm @ 1 kVA
0.7 nm @ 15 kV
  ‰Á‘¬“dˆ³ 0.1 kV – 30 kV
  “dŽqe —â‰A‹É“dŠE•úoŒ^
ŽŽ—¿ƒTƒCƒY Å‘å 150 mmŒa
ƒIƒvƒVƒ‡ƒ“ Ar/XeƒCƒIƒ“ƒr[ƒ€ƒVƒXƒeƒ€
EDSiƒGƒlƒ‹ƒM[•ªŽUŒ^Xü•ªÍ‘•’uj
 
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”½‰ž‰ÈŠw’´‚ˆ³‘–¸“§‰ß“dŽqŒ°”÷‹¾
Žû·•â³“dŽqŒ°”÷‹¾i—â“dŠE•úo“dŽqej
Žû·•â³“dŽqŒ°”÷‹¾i“dŠE•úo“dŽqej
“dŽq•ªŒõ‘–¸“§‰ß“dŽqŒ°”÷‹¾
‚•ª‰ð”\•ªÍ“dŽqŒ°”÷‹¾
‘–¸“dŽqŒ°”÷‹¾

ŽŽ—¿ì»‘•’uŒQ
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ƒAƒ‹ƒSƒ“ƒCƒIƒ“Œ¤–‘•’u
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